Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers
نویسندگان
چکیده
Joohan Kim Halil Berberoglu Xianfan Xu Purdue University School of Mechanical Engineering West Lafayette, Indiana 47907 E-mail: [email protected] Abstract. We discuss laser fabrication of microstructures in photoetchable glass ceramics called Foturan (Schott Company, Elmsford, NY). A KrF excimer laser (l5248 nm, t525 ns) is used for surface micromachining, and a femtosecond laser (l5800 nm, t580 fs) is used for fabricating 3-D structures. Important aspects of the machining, such as depth of machining resulting from different laser processing parameters and threshold laser fluences, are presented. A detailed analysis of the absorption process of both lasers in photoetchable glass ceramics is provided. © 2004 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.1759330]
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